MountainsMap® Example Applications

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MEMS layers – flatness and roughness

3D optical profiler + MountainsMap® Imaging Topography software

Input Data

  • Topography (x, y, z) of MEMS.
  • Results

  • 3D surface topography of MEMS and extracted layer.
  • Calculation of flatness and roughness parameters for the extracted layer only.
  • MountainsMap® tools used

  • Partition & level and calculation of ISO 12781 flatness parameters in 3D Advanced Surface Texture module. module.
  • Calculation of ISO 25178 height parameters.

  • List of applications in gallery

    3D Optical

    3D Scanning



    SEM (scanning electron microscope)



    Correlative Studies

    3D Optical Profiler + SEM (scanning electron microscope)

    AFM-IR (atomic force microscope with tunable pulsed infrared source)

    STM (scanning tunneling microscope) + SEM (scanning electron microscope)

    AFM (atomic force microscope) + SEM (scanning electron microscope)

    AFM (atomic force microscope) + fluorescence microscope

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