MountainsMap® Example Applications

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MEMS layers – flatness and roughness

3D optical profiler + MountainsMap® Imaging Topography software

Input Data

  • Topography (x, y, z) of MEMS.
  • Results

  • 3D surface topography of MEMS and extracted layer.
  • Calculation of flatness and roughness parameters for the extracted layer only.
  • Mountains® tools used

  • Partition & level and calculation of ISO 12781 flatness parameters in 3D Advanced Surface Texture module. module.
  • Calculation of ISO 25178 height parameters.

  • List of applications in gallery

    3D Optical

    3D Optical Profilers

    3D Scanning

    3D Scanning Profilometers


    AFM (atomic force microscope)


    SEM (scanning electron microscope)


    Hyperspectal microscopes


    2D Profilometers

    Correlative Studies

    3D Optical Profiler + SEM (scanning electron microscope)

    AFM-IR (atomic force microscope with tunable pulsed infrared source)

    STM (scanning tunneling microscope) + SEM (scanning electron microscope)

    AFM (atomic force microscope) + SEM (scanning electron microscope)

    AFM (atomic force microscope) + fluorescence microscope

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